New semiconductor chiller combines deep cooling with refrigerant that has no global warming potential

T2Covered by 1 source · first reported by Phys.org / ScienceDaily (tech) at 02 Nov, 20:40 UTC

A large-capacity industrial chiller capable of providing cooling at temperatures of −120°C or below has been developed to remove heat generated during semiconductor manufacturing processes. Using nitrogen as a refrigerant with a global warming potential (GWP) of zero, the system combines…

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• T2New semiconductor chiller combines deep cooling with refrigerant that has no global warming potentialPhys.org / ScienceDaily (tech)02 Nov, 20:40