Start-up unveils prototype ‘heart’ of EUV lithography amid China chipmaking push

T2Covered by 1 source · first reported by China: SCMP Tech / TechNode / Pandaily / KrASIA / Sixth Tone at 15 Oct, 06:01 UTC

A Chinese start-up has unveiled a prototype extreme ultraviolet (EUV) light-source machine – a component often described as the “heart” of advanced lithography systems – marking an early but critical step in Beijing’s drive for self-reliance in chipmaking equipment. At the China International…