ASML starts on Hyper NA EUV

T2Covered by 1 source · first reported by Semiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly at 09 Oct, 05:16 UTC

ASML has begun a ten year programme to get feature sizes down to 5nm from the 8nm which high NA tools can deliver. The 5nm litho tool is dubbed Hyper […] The post ASML starts on Hyper NA EUV appeared first on Electronics Weekly.

hardware

Sources

• T2ASML starts on Hyper NA EUVSemiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly09 Oct, 05:16