Gigaphoton Develops Gas Recycling System for ArF Excimer Lasers

T2Covered by 1 source · first reported by Semiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly at 01 Oct, 13:14 UTC

Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it developed hTGM for ArF, the on-site neon gas recycling system for ArF excimer lasers. ArF lithography plays a critical role in the mass…

hardware

Sources

• T2Gigaphoton Develops Gas Recycling System for ArF Excimer LasersSemiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly01 Oct, 13:14