Gigaphoton Begins Evaluation of L300KZ Excimer Laser for Pulsed Laser Deposition for Advanced Materials Applications

T2Covered by 1 source · first reported by Semiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly at 30 Sept, 13:50 UTC

Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for leading-edge semiconductor fabrication processes, today announced that it has installed its L300KZ KrF excimer laser for pulsed laser deposition (PLD) at a domestic manufacturer of…

hardware

Sources

• T2Gigaphoton Begins Evaluation of L300KZ Excimer Laser for Pulsed Laser Deposition for Advanced Materials ApplicationsSemiconductor Engineering / SemiWiki / EE Times / EE Journal / Electronics Weekly30 Sept, 13:50